JPH03782B2 - - Google Patents

Info

Publication number
JPH03782B2
JPH03782B2 JP55140332A JP14033280A JPH03782B2 JP H03782 B2 JPH03782 B2 JP H03782B2 JP 55140332 A JP55140332 A JP 55140332A JP 14033280 A JP14033280 A JP 14033280A JP H03782 B2 JPH03782 B2 JP H03782B2
Authority
JP
Japan
Prior art keywords
cassette
opening
door member
glass substrate
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP55140332A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5764928A (en
Inventor
Nobutoshi Abe
Yukio Kakizaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Priority to JP55140332A priority Critical patent/JPS5764928A/ja
Publication of JPS5764928A publication Critical patent/JPS5764928A/ja
Publication of JPH03782B2 publication Critical patent/JPH03782B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/66—Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G03F7/70741—Handling masks outside exposure position, e.g. reticle libraries

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Library & Information Science (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Warehouses Or Storage Devices (AREA)
JP55140332A 1980-10-07 1980-10-07 Carrying apparatus for photo mask or reticle Granted JPS5764928A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55140332A JPS5764928A (en) 1980-10-07 1980-10-07 Carrying apparatus for photo mask or reticle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55140332A JPS5764928A (en) 1980-10-07 1980-10-07 Carrying apparatus for photo mask or reticle

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP63056285A Division JPS63265445A (ja) 1988-03-11 1988-03-11 基板の保管、搬送装置

Publications (2)

Publication Number Publication Date
JPS5764928A JPS5764928A (en) 1982-04-20
JPH03782B2 true JPH03782B2 (en]) 1991-01-08

Family

ID=15266355

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55140332A Granted JPS5764928A (en) 1980-10-07 1980-10-07 Carrying apparatus for photo mask or reticle

Country Status (1)

Country Link
JP (1) JPS5764928A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2268003A2 (en) 2004-04-26 2010-12-29 Sony Corporation Solid-state imaging device and driving method therefor

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59175740A (ja) * 1983-03-25 1984-10-04 Telmec Co Ltd ウエハ検出装置
US4758127A (en) * 1983-06-24 1988-07-19 Canon Kabushiki Kaisha Original feeding apparatus and a cassette for containing the original
JPS6169129A (ja) * 1984-09-13 1986-04-09 Canon Inc 原版自動交換装置
JPS6196458A (ja) * 1984-10-18 1986-05-15 Canon Inc 接触触質自給式超音波探傷走査装置
KR940000696B1 (ko) * 1986-04-15 1994-01-27 햄프셔 인스트루 먼트스 인코포레이티드 엑스레이 석판인쇄 장치
US4999671A (en) * 1986-07-11 1991-03-12 Canon Kabushiki Kaisha Reticle conveying device
US4984953A (en) * 1987-02-20 1991-01-15 Canon Kabushiki Kaisha Plate-like article conveying system
JPS63208452A (ja) * 1987-02-20 1988-08-29 Canon Inc 基板搬送装置
JPS63208414A (ja) * 1987-02-20 1988-08-29 Canon Inc 基板搬送装置
JPH0780568B2 (ja) * 1987-02-20 1995-08-30 キヤノン株式会社 基板搬送装置
DE3716549A1 (de) * 1987-05-17 1988-12-08 Leitz Ernst Gmbh Handhabungsautomat fuer plattenfoermige objekte
JPS63265445A (ja) * 1988-03-11 1988-11-01 Nikon Corp 基板の保管、搬送装置
JP2500205B2 (ja) * 1991-03-23 1996-05-29 東京エレクトロン株式会社 ウエハ移送装置
US5330309A (en) * 1992-11-25 1994-07-19 Eastman Kodak Company Reader having cassette locating and unlatching mechanism
JP2790209B2 (ja) * 1993-01-18 1998-08-27 キヤノン株式会社 物品供給装置
EP0940779B1 (en) * 1994-05-20 2006-08-16 Fujitsu Limited Paper sheet manipulating apparatus
US6113346A (en) * 1996-07-31 2000-09-05 Agfa Corporation Method for loading and unloading a supply of plates in an automated plate handler
KR100665293B1 (ko) * 2006-01-04 2007-01-17 코리아테크노(주) 마스크 운송박스 박스커버 오프너
CN104142612B (zh) * 2013-05-08 2016-07-06 上海微电子装备有限公司 一种掩膜版回推机构

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54109760A (en) * 1978-02-16 1979-08-28 Toshiba Corp Carrier for semiconductor wafer
JPS5544927A (en) * 1978-09-27 1980-03-29 Toshiba Electric Equip Corp Smoke sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2268003A2 (en) 2004-04-26 2010-12-29 Sony Corporation Solid-state imaging device and driving method therefor

Also Published As

Publication number Publication date
JPS5764928A (en) 1982-04-20

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